Since the launch of CEPURE in-line gas filters in 1988, CoorsTek has constantly endeavored to improve the purity and cleanliness of gas lines for semiconductor manufacturing equipment. The M Series, our first generation of products, adopted hexagonal multi-channel elements. In 1992, we introduced to the market the TM Series, our second-generation products that retained particle-free performance while improving the gas displacement properties. Today, the CEPURE series has evolved to the third-generation STM Series with even better gas displacement properties and further reductions in size. For these reasons, the STM Series has earned an excellent reputation among users. At the same time, we have added the STM-V Series to our line of products in order to meet the requirements of integration-type gas panels, which are becoming the mainstream in the semiconductor manufacturing equipment industry. Furthermore, we continue to press forward with the development of various types of filter application products to match increasingly diverse user needs while working on reducing the size of integrated filters and improving their performance.
The table below shows a comparative analysis of conventional gas filters that were used in actual manufacturing processes. Nitrogen gas was introduced from the inlet of the filters, and the particles discharged from the outlets were captured in pure water for analysis. As shown in the table, the conventional gas filters may turn into dust generators depending on how they are used.
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| Sample | Al | Fe | Na | Cr | Ni | Si | Gas used |
|---|---|---|---|---|---|---|---|
| CEPURE |  |
|
|
|
|
|
BCl3 |
| Filter-A | 0.06 | 23 | 0.17 | 0.82 | 3.4 | 1.80 | H2 |
| Filter-B | 0.33 | 0.87 | 0.01 | 0.32 | |
5.70 | SiH4 |
| Filter-C | 0.06 | >4 | |
>10 | >3 | 0.05 | HCl |
: Below measurable limit
At CoorsTek, we have come to position "process gas exchange properties" as the most important feature of filters, based on our numerous experiences with the analysis of filters utilized by users. As can be seen from the graphs below, our ceramic filters demonstrate superior HCl gas exchange.
New product measurement
Re-measurement following exposure to air
Elements used in CEPURE in-line gas filters are made of highly corrosion resistant high-purity alumina that is at least 99.9% pure, and have minute pores in three layers that are uniformly controlled.
They are designed geometrically to reduce pressure loss, and outstanding with respect to such properties as filtering and gas displacement properties, which are demanded of gas filters. They can be called the ideal filter media.
