Such properties as high purity, strength and corrosion resistance make them suitable for process tubes for semiconductor heat-treatment furnaces, liner tubes, boats and paddles. In addition, we use the CVD method to offer a highgrade product coated with super high purity, fine silicon carbide, making it suitable for a wide range of customer
Our high purity graphite materials are widely used in the semiconductor manufacturing process as heaters and crucibles for pulling single crystal silicon and
boats for liquid phase epitaxial growth. In addition, CLEAR CARBON™, composed of an SiC surface coating on a high purity graphite substrate, has earned a reputation
world wide for excellent quality as susceptors for epitaxial growth and other jigs.
CERASIC, a silicon carbide material sintered under atmospheric pressure is the ideal material for machine parts that require not only high thermal strength, but also
abrasion and corrosion resistance. A range of applications in the semiconductor manufacturing process have been developed for this material?for example, carrier
blades for silicon wafer transfer system, and lapping plates for wafer polishing. In addition, ultra high purity products with a CVD coat are available. In addition, it is
widely used as a large component in FPD production.
CERASIC, a silicon carbide material sintered under atmospheric pressure, is a ceramic material for structure that has the superior properties of high thermal strength, high hardness and high elasticity. They are, therefore, capable of protecting from shocks during road excavations when laying the optical fiber under the ground or the construction making the joint trench for electric wires, and preventing the conduit materials from damage.
CERASIC, a silicon carbide material sintered under atmospheric pressure, is a ceramic material that has superior properties in terms of machining, abrasion, and corrosion-resistance to corrosive gas and chemicals. It is widely used in heat-treatment, and its long life property makes it a recognized contributor to low running costs and the reduction of industrial waste.
Monolithic refractories include castable, plastic, and ramming materials exhibiting properties that outperform traditional refractory bricks. They are widely used in the construction of new kilns and furnaces and in the repair of older ones, and in a variety of other applications.
The TECORUNDUM series of non-metallic heating elements are made of recrystallized silicon carbide. These elements are usable at 1,400 and their calorific value per unit area, which is higher than nichrome elements, allows them to be heated quickly. Simple to use and with a long service life, these heating elements are employed in a wide variety of heat treatment applications, including heat treatment of electronic component, sintering of metal powders, annealing of wire rods, and melting of glass and other substances.