TPSS Si-Impregnated Silicon Carbide Products

TPSS, which features high-purity silicon carbide as its main material, is a semiconductor-related material manufactured using technology developed by CoorsTek. It is available in standard U grade and high-purity alpha grade. TPSS products feature high purity, high strength, and high corrosion resistance and are widely used as process tubes, liner tubes, forks, and wafer boats in the heat treatment processes of silicon wafers. The company meets a wide range of needs with ultrahigh purity grades TPSS -CU and TPSS -C alpha, in which the base materials TPSS -U and TPSS -alpha are coated with a high-purity CVD silicon carbide film.TPSS Si-impregnated silicon carbide products are semiconductor materials developed by our company using proprietary technology. Such properties as high purity, strength and corrosion resistance make them suitable for process tubes, liner tubes, boats and paddles for semiconductor heat treatment furnaces. In addition, we use the CVD method to offer a high grade product coated with super high purity, fine silicon carbide, making it suitable for a wide range of customer requirements. It has a good name in wafer boats manufactured with maximum use of processing technologies, which can raise the quality and yield rate for 300mm wafer processing.

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Process tube and wafer boat
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Wafer boats for horizontal furnace
Image of Process tubes for horizontal furnace
Process tubes for horizontal furnace

TPSS : Certified Supplier
CoorsTek is the certified supplier of 300 mm SiC products for the three major equipment manufacturers; ASM Pacific Technology Ltd., Hitachi Kokusai Electric Inc., and Tokyo Electron AT Ltd.

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Customer Certificates


The CVD coated SiC film on the surface of TPSS has a coefficient of thermal expansion similar to those of deposited films (SiN, Si, etc.) produced in LP-CVD processes. This yields less particle generation caused by the peel-off of the deposited film.

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(Unit: X10-6/K)

Material Coefficient of thermal expansion (Typical data)
Boat Silicon Carbide 4.3
Quartz Glass 0.5
Deposited film Silicon Nitride 3.5
Silicon 3.9


Purity Level (Typical Data)


Grade Fe Al Na K Ca Cu Cr Ni
TPSS -U 2.5 0.5 0.2 0.2 0.7 <0.01 0.1 0.3
TPSS -CU 0.04 0.02 0.02 <0.1 0.01 <0.01 <0.01 0.01

The test sample was prepared through the pressurized acid solution method and assayed by atomic absorption spectroscopy.
TPSS -CU represents the analysis values of the CVD film.

Thermal Properties (Typical Data)

TPSS has a higher thermal conductivity than quartz glass. This makes it to obtain a thermal flat zone when TPSS is used as a furnance tube. TPSS also has higher resistance to thermal shock than alumina.

Material Specific heat
(Room temp. J/g°K)
Coefficient of thermal expantion
Thermal conductivity
(Room temp.W/m°K)
Thermal shock resistance
(deltaT, degree)
TPSS 0.69 4.3 (Room temp.-1000degrees) 175 400
Quartz glass 0.20 0.5 (Room temp.-1000degrees) 1.66 900
Almina 0.79 7.8 (Room temp.-1000degrees) 30 220

Specific heat of TPSS at various temperatures
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Average coefficient of thermal expansion of TPSS from room temperature to various temperatures
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Thermal conductivity of TPSS at various temperatures
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Corrosion and Oxidation Resistance


Comparison of corrosion resistance to HF
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Comparision of corrosion resisitance to Nitric acid : HF : pure water (X: 1: 4, in volume ratio)
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Electrical resistyvity of TPSS
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Electric Properties (Typical Data)

TPSS is a conductive material and is rarely electrically charged.
The following table compares the electrical resistivity of TPSS with that of other materials.

Material Electrical resistivity
TPSS 10-1
Quartz glass 1018
Alumina 1014
Carbon 10-3

Electrical resistivity of TPSS
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