CoorsTek’ translucent poly-crystal alumina ceramics, SAPPHAL, display high purity and excellent corrosion resistance to fluorine gas, and show an excellent performance as semiconductor processing parts. Utilizing manufacturing technology, dome shapes, large size plates, and rings are available, giving the customer design flexibility.
ADS is a high density alumina ceramics, with an abrasionresistance and low water absorption rate of 0.01% or less.As well as possessing high mechanical strength, ADS features excellent electrical insulation, and stability against chemicals. ADS is widely employed as parts and jigs for the semiconductor industry.
