Such properties as high purity, strength and corrosion resistance make them suitable for process tubes for semiconductor heat-treatment furnaces, liner tubes, boats and paddles. In addition, we use the CVD method to offer a highgrade product coated with super high purity, fine silicon carbide, making it suitable for a wide range of customer
requirements.
CERASIC, a silicon carbide material sintered under atmospheric pressure is the ideal material for machine parts that require not only high thermal strength, but also
abrasion and corrosion resistance. A range of applications in the semiconductor manufacturing process have been developed for this material?for example, carrier
blades for silicon wafer transfer system, and lapping plates for wafer polishing. In addition, ultra high purity products with a CVD coat are available. In addition, it is
widely used as a large component in FPD production.
Excellent physical strength even at 1400 deg C. Excellent creep resistance (shape stability).
