High-purity silicon parts, which have the same degree of purity as silicon wafers, generate almost no contamination and considerably fewer particles. Although the standard product is manufactured in a plate shape, it can also be produced as a rod or a ring. Furthermore, high-precision machining that was once considered difficult when producing parts is now possible. Therefore, there are great expectations regarding its application in various processes.

High-Purity Silicon Parts

Product Properties (Typical Data)

Size	Type	Typical resistivity	Oxygen density
		(·cm)	(1018 atoms/cm3)
200XL	P/N	1-20	0.5-2.0
300XL	P/N	1-20	0.5-2.0
400XL	P/N	1-20	0.5-2.0

Physical Properties (Typical Data)

Bulk density	g/cm3	2.33
Bending strength	MPa	max 300
Young's modulus	GPa	190
Coefficient of thermal expansion	10-6/K	3.9
Thermal conductivity	(Room temp.) W/mk	157
Electrical conductivity	·cm	1-20
Max. service temperature		1300