TPSS, which features high-purity silicon carbide as its main material, is a semiconductor-related material manufactured using technology developed by CoorsTek. It is available in standard U grade and high-purity alpha grade. TPSS products feature high purity, high strength, and high corrosion resistance and are widely used as process tubes, liner tubes, forks, and wafer boats in the heat treatment processes of silicon wafers. The company meets a wide range of needs with ultrahigh purity grades TPSS -CU and TPSS -C alpha, in which the base materials TPSS -U and TPSS -alpha are coated with a high-purity CVD silicon carbide film.TPSS Si-impregnated silicon carbide products are semiconductor materials developed by our company using proprietary technology. Such properties as high purity, strength and corrosion resistance make them suitable for process tubes, liner tubes, boats and paddles for semiconductor heat treatment furnaces. In addition, we use the CVD method to offer a high grade product coated with super high purity, fine silicon carbide, making it suitable for a wide range of customer requirements. It has a good name in wafer boats manufactured with maximum use of processing technologies, which can raise the quality and yield rate for 300mm wafer processing.

Features

The CVD coated SiC film on the surface of TPSS has a coefficient of thermal expansion similar to those of deposited films (SiN, Si, etc.) produced in LP-CVD processes. This yields less particle generation caused by the peel-off of the deposited film.

(Unit: X10^-6/K)

Material		Coefficient of thermal expansion (Typical data)
Boat	Silicon Carbide	4.3
	Quartz Glass	0.5
Deposited film	Silicon Nitride	3.5
	Silicon	3.9

RT.max800

Purity Level (Typical Data)

[ppm]

Grade	Fe	Al	Na	K	Ca	Cu	Cr	Ni
TPSS -U	2.5	0.5	0.2	0.2	0.7	<0.01	0.1	0.3
TPSS -CU	0.04	0.02	0.02	<0.1	0.01	<0.01	<0.01	0.01

The test sample was prepared through the pressurized acid solution method and assayed by atomic absorption spectroscopy.
TPSS -CU represents the analysis values of the CVD film.

Thermal Properties (Typical Data)

TPSS has a higher thermal conductivity than quartz glass. This makes it to obtain a thermal flat zone when TPSS is used as a furnance tube. TPSS also has higher resistance to thermal shock than alumina.

Material	Specific heat (Room temp. J/g°K)	Coefficient of thermal expantion (X10°/°K)	Thermal conductivity (Room temp.W/m°K)	Thermal shock resistance (T, )
TPSS	0.69	4.3 (Room temp.-1000)	175	400
Quartz glass	0.20	0.5 (Room temp.-1000)	1.66	900
Almina	0.79	7.8 (Room temp.-1000)	30	220

Specific heat of TPSS at various temperatures

Average coefficient of thermal expansion of TPSS from room temperature to various temperatures

Thermal conductivity of TPSS at various temperatures

Corrosion and Oxidation Resistance

Electrical resistyvity of TPSS

Electric Properties (Typical Data)

TPSS is a conductive material and is rarely electrically charged.
The following table compares the electrical resistivity of TPSS with that of other materials.